Multilayer growth by low energy ion beam deposition
(1999)
Journal Article
Joyce, D., Telling, N., Van den Berg, J., Lord, D., & Grundy, P. (1999). Multilayer growth by low energy ion beam deposition. Journal of Magnetism and Magnetic Materials, 198-199, 731-733. https://doi.org/10.1016/s0304-8853%2898%2901021-x
We report our progress in the development of a relatively new deposition technique, that of direct low energy ion beam deposition. We describe this technique, which is based on ion implanter technology similar to that used in the semiconductor indust... Read More about Multilayer growth by low energy ion beam deposition.