Synchrotron x-ray diffraction study of micro-patterns obtained by spatially selective hydrogenation of GaAsN
(2015)
Journal Article
Pettinari, G., Balakrishnan, N., Ciatto, G., Birindelli, S., Felici, M., Polimeni, A., …Patanè, A. (2015). Synchrotron x-ray diffraction study of micro-patterns obtained by spatially selective hydrogenation of GaAsN. Applied Physics Letters, 051905 - 051905. https://doi.org/10.1063/1.4907324
We report a comparative synchrotron radiation x-ray diffraction study of GaAs1-yNy micro-structures obtained by two different patterning methods: spatially selective H incorporation achieved by using H-opaque masks and spatially selective H removal a... Read More about Synchrotron x-ray diffraction study of micro-patterns obtained by spatially selective hydrogenation of GaAsN.