Substrate-induced strain in molybdenum disulfide grown by aerosol-assisted chemical vapor deposition

Adams, Lewis J; Matthews, Peter D; Morbec, Juliana M; Balakrishnan, Nilanthy

Abstract

Transition metal dichalcogenides have been extensively studied in recent years because of their fascinating optical, electrical, and catalytic properties. However, low-cost, scalable production remains a challenge. Aerosol-assisted chemical vapor deposition (AACVD) provides a new method for scalable thin film growth. In this study, we demonstrate the growth of molybdenum disulfide (MoS2) thin films using AACVD method. This method proves its suitability for low-temperature growth of MoS2 thin films on various substrates, such as glass, silicon dioxide, quartz, silicon, hexagonal boron nitride, and highly ordered pyrolytic graphite. The as-grown MoS2 shows evidence of substrate-induced strain. The type of strain and the morphology of the as-grown MoS2 highly depend on the growth substrate's surface roughness, crystallinity, and chemical reactivity. Moreover, the as-grown MoS2 shows the presence of both direct and indirect band gaps, suitable for exploitation in future electronics and optoelectronics.

Citation

Adams, L. J., Matthews, P. D., Morbec, J. M., & Balakrishnan, N. (in press). Substrate-induced strain in molybdenum disulfide grown by aerosol-assisted chemical vapor deposition. Nanotechnology, 35(39), Article 395602. https://doi.org/10.1088/1361-6528/ad5dc1

• Journal Article Type: Article
• Acceptance Date: Jul 2, 2024
• Online Publication Date: Jul 11, 2024
• Deposit Date: Jul 6, 2024
• Publicly Available Date: Jul 16, 2024
• Journal: Nanotechnology
• Print ISSN: 0957-4484
• Electronic ISSN: 1361-6528
• Publisher: IOP Publishing
• Peer Reviewed: Peer Reviewed
• Volume: 35
• Issue: 39
• Article Number: 395602
• DOI: https://doi.org/10.1088/1361-6528/ad5dc1
• Keywords: thin films, aerosol-assisted chemical vapor deposition, strain, molybdenum disulfide, transition metal dichalcogenides
• Public URL: https://keele-repository.worktribe.com/output/873538
• Publisher URL: https://iopscience.iop.org/article/10.1088/1361-6528/ad5dc1
• Additional Information: This work was supported by the Keele University, Royal Society [under grants RSG/R2/212359, and SIF/R2/212004], Engineering and Physical Sciences Research Council (EPSRC) [under grant EP/V043412/1], the UK Government and the European Union [under SEND programme 32R16P00706].