Gas incorporation in sputtered and evaporated metal films
Thesis
Mitchell, I. V. (1972). Gas incorporation in sputtered and evaporated metal films
The argon and nitrogen gas concentrations in thin films have been measured for seven different metals. Sputtered and evaporated films are deposited on glass and tungsten substrates in a stainless steel ultra high vacuum system, which is designed to o... Read More about Gas incorporation in sputtered and evaporated metal films.