Microstructure of Fe–N thin films prepared using an atomic nitrogen beam
(2001)
Journal Article
Telling, N. D., Jones, G. A., Faunce, C. A., Grundy, P. J., Blythe, H. J., & Joyce, D. E. (2001). Microstructure of Fe–N thin films prepared using an atomic nitrogen beam. Journal of Vacuum Science and Technology A, 19(2), 405-409. https://doi.org/10.1116/1.1339016
The formation of Fe–N thin films by exposure to an atomic (free radical) nitrogen beam is reported. This new method of preparing Fe–N films uses fluxes of highly reactive, thermal energy N atoms that do not disturb the film microstructure. It is show... Read More about Microstructure of Fe–N thin films prepared using an atomic nitrogen beam.